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Plasma Processes for Semiconductor Fabrication (Cambridge Studies in Semiconductor Physics and Microelectronic Engineering) Book
Plasma processing is a central technique in the fabrication of semiconductor devices. This self-contained book provides an up-to-date description of plasma etching and deposition in semiconductor fabrication. It presents the basic physics and chemistry of these processes, and shows how they can be accurately modeled.No prior knowledge of plasma physics is assumed in the book. It contains many homework exercises and will serve as an ideal introduction to plasma processing and technology for graduate students of electrical engineering and materials science. It will also be a useful reference for practicing engineers in the semiconductor industry.Read More
from£46.75 | RRP: * Excludes Voucher Code Discount Also available Used from £62.00
- 0521018005
- 9780521018005
- W. N. G. Hitchon
- 29 September 2005
- Cambridge University Press
- Paperback (Book)
- 232
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